About the role
AI summarisedServe as the primary owner for advanced Etch equipment, responsible for maximizing uptime, optimizing performance metrics (OEE, MTBF, MTTR), and collaborating closely with process engineering to ensure equipment performance meets stringent yield and parametric requirements.
IDMOnsiteEquipment Engineering
Key Responsibilities
- Serve as primary owner for assigned Etch tools, specifically LAM XLE and LAM Rainbow systems.
- Maintain and continuously improve OEE, MTBF, and MTTR targets for owned equipment.
- Develop and maintain equipment health monitoring and baseline control using SPC, FDC, fault codes, and alarms.
- Plan, execute, and optimize preventive maintenance (PM) activities per OEM recommendations and fab strategies.
- Perform complex troubleshooting across electrical, mechanical, vacuum, RF, gas delivery, and software subsystems.
- Lead Root Cause Analysis (RCA) for chronic issues using structured methodologies (8D, Fishbone, 5-Why).
- Collaborate with process engineering to ensure equipment performance supports CD, profile, uniformity, selectivity, and defectivity requirements.
- Analyze tool logs, SPC charts, metrology data, and wafer maps to correlate equipment conditions with yield.
- Identify and implement improvement projects to increase uptime, extend parts lifetime, and reduce operating cost.
- Create and maintain standard operating procedures (SOPs) and troubleshooting guides for equipment.
Requirements
- Bachelor’s Degree in Electrical & Electronics Engineering, Materials Science Engineering, Chemical Engineering, or equivalent.
- Minimum 5 years of relevant work experience in the Semiconductor Etch area.
- Familiarity with Etch Equipment, specifically LAM XLE and LAM Rainbow systems.
- Strong analytical and problem-solving abilities.
- Proficiency in troubleshooting complex vacuum, gas delivery, and plasma systems.
- Ability to drive daily tool performance reviews and recovery plans.