About the role
AI summarisedAs a Senior Process Engineer, you will be the technical owner for tungsten deposition and etch-back processes, with a primary focus on W deposition on the Novellus Altus platform. You will work closely with equipment engineers to characterize hardware, resolve complex issues, and continuously improve process stability, capability, and yield.
IDMOnsiteProcess Engineering
Key Responsibilities
- Develop, sustain, and optimize CVD tungsten, WALD, and tungsten etch-back processes, focusing on Pulsed Nucleation Layer (PNL) tungsten on Novellus Altus Drive hardware.
- Perform recipe characterization on Altus systems to improve film uniformity, reduce defects, and enhance tool productivity.
- Perform structured troubleshooting and root-cause analysis to resolve process excursions and chronic issues.
- Correlate process conditions with film properties and device performance using structural, electrical, and reliability data.
- Collaborate with integration, device, yield, equipment teams, and vendors to support technology transfers and new node ramp-up.
Requirements
- Degree in Electrical & Electronics, Microelectronics, Material Science, Applied Physics, Chemical, or Mechanical Engineering.
- Minimum 5 years of experience in Thin Film Tungsten process on Novellus Altus system.
- Strong fundamentals in thin-film deposition, especially CVD W / WALD, nucleation, and etch-back mechanisms.
- Effective collaboration and communication skills.