About the role
AI summarisedThe role is a MEMS fabrication process integrator within an R&D environment, responsible for developing integration platforms and process flows for piezoelectric MEMS devices such as ultrasonic transducers and RF devices. The engineer will manage wafer lots in the cleanroom, perform device characterization and failure analysis, and coordinate with internal and external stakeholders on project execution.
ResearchOnsiteInstitute of Microelectronics
Key Responsibilities
- Work with design and process module team to develop integration platforms based on PZT, ScAlN films, and other piezo materials
- Design integration process flows for upcoming piezoelectric MEMS devices, design and execute DOEs to realize the devices
- Conduct integration and fabrication of thin-film piezoelectric ultrasonic transducers, acoustic devices and RF devices
- Manage wafer lot progress in the cleanroom, conduct inspection and characterization of MEMS devices/structures and failure analysis, using metrology tools such as DRSEM, CDSEM, ellipsometers, and microscopes
- Communicate with internal and external customers on the project progress and manage the project execution
Requirements
- BS/MS in Electronics Engineering/Chemical Engineering/Mechanical Engineering/Material Engineering/Applied Physics or equivalent
- At least 3 years' experience in semiconductor process modules, integration or MEMS related modules and integration
- Good knowledge and hands on experience on microfabrication processes (e.g. etch, lithography, CMP, PVD and PECVD), process recipe tuning experience is a plus
- Good knowledge and hands on experience on microfabrication inspection and characterization methods, and data analysis of wafer-level measurements
- Good communication and presentation skills, ability to work independently, as well as being an excellent team player
- Continuously seeks opportunities to expand knowledge and skills, staying up to date with emerging trends and advancements in the field
- Capable of conceptualizing and implementing creative approaches to address research questions and technology development