About the role
AI summarisedSenior/Lead Research Engineer leading lithography process development and tool qualification for advanced R&D programs at IME, covering immersion to contact aligner technologies across 6-12 inch substrates including SiC/GaN/Photonics applications.
ResearchOnsiteInstitute of Microelectronics
Key Responsibilities
- Leading central lithography team under pattern transfer group
- Actively working with cross functional stake owners to plan and develop new lithography process
- Validate design, reticle tap out and post tap out verification
- Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution
- Perform process characterization, margin study to determine the process capability of new process platform
- Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization
- Publish process development outcome and breakthrough in research community
- Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment
- Work with fab team in establishing SPC for newly developed process
Requirements
- Ph.D/Master/Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply
- More than 10 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6”, 8” and/or 12” substrate covering nano to micron tech nodes, preferably experiences in SiC/GaN/Photonics
- Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage
- Hands-on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement
- Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process
- Relevant hardware and application knowledge in Lithography tools and metrology
- Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders