About the role
AI summarisedSenior Scientist for Ion Implantation at the Institute of Microelectronics (IME), leading R&D in advanced process modules for next-generation semiconductor devices. The role focuses on developing ion implantation process technology, managing implantation processes, performing simulations, and collaborating with cross-functional teams and customers.
ResearchFull-timeInstitute of Microelectronics
Key Responsibilities
- Diagnose and Troubleshoot: Utilize advanced diagnostic tools and software to identify, analyze, and resolve equipment malfunctions, applying a strong understanding of ion implanter system functionality.
- Process Development: Support on-site ion implantation operations by creating, executing, and characterizing implantation recipes for validation, ensuring optimal dopant profiles and superior damage recovery.
- Vendor Collaboration: Work closely with equipment vendors to enhance system performance, improve process stability, and minimize tool downtime.
- Defect Analysis: Analyze implant-induced defect formation data to quantify impacts on device performance and develop strategies for defect reduction and process optimization.
- Operational Support: Review work orders and coordinate with equipment operators to diagnose and resolve equipment issues, identifying both mechanical and human factors contributing to failures.
- Experimental Design: Design and execute ion implantation experiments across a range of doses, energies, tilt, and twist angles to support process innovation and device performance enhancement.
Requirements
- M.Sc. or Ph.D. in Electrical Engineering, Materials Science, Physics, or a related field.
- Minimum of 3 years of industrial experience in semiconductor device process development or high-energy ion implantation applications.
- Strong proficiency in medium- to high-energy/current ion implantation processes, with comprehensive knowledge of implanter systems, subsystems, and troubleshooting methods to minimize equipment downtime.
- Solid understanding of wide-bandgap semiconductor materials (e.g., SiC, GaN) and their relevant dopant species.
- Expertise in ion channelling, ion bombardment, and their impact on implant species profiles.
- In-depth comprehension of defect formation and annihilation processes in the implanted region of semiconductors.
- Familiarity with process simulation (e.g., SRIM/TRIM, Silvaco Athena, Sentaurus Process).
- Good publication record in semiconductor process or materials science journals.
- Ability to work collaboratively across multidisciplinary teams (process, metrology, device, modelling).
- Adept at mentoring and transferring knowledge to junior staff members.