About the role
AI summarisedIME is seeking a Senior Scientist to join our R&D program focused on advancing critical process modules for next-generation device fabrication, with a specialization in ion implantation. This role involves leading the development and optimization of ion implantation processes, including lattice damage control and post-implant recovery, requiring deep knowledge of crystallography and ion-atom interactions.
ResearchOnsiteInstitute of Microelectronics
Key Responsibilities
- Diagnose and Troubleshoot malfunctions in ion implanter systems using advanced diagnostic tools and software.
- Support on-site ion implantation operations by creating, executing, and characterizing implantation recipes for optimal dopant profiles.
- Analyze implant-induced defect formation data to quantify impacts on device performance and develop reduction strategies.
- Design and execute ion implantation experiments varying doses, energies, tilt, and twist angles to drive process innovation.
- Collaborate with equipment vendors to enhance system performance, improve process stability, and minimize tool downtime.
- Review work orders and coordinate with operators to resolve equipment issues, identifying mechanical and human factors.
Requirements
- M.Sc. or Ph.D. in Electrical Engineering, Materials Science, Physics, or a related field.
- Minimum of 3 years of industrial experience in semiconductor device process development or high-energy ion implantation applications.
- Strong proficiency in medium- to high-energy/current ion implantation processes and implanter systems.
- Solid understanding of wide-bandgap semiconductor materials (e.g., SiC, GaN) and their dopant species.
- Expertise in ion channelling, ion bombardment, and their impact on implant species profiles.
- In-depth comprehension of defect formation and annihilation processes in implanted semiconductors.
- Familiarity with process simulation tools (e.g., SRIM/TRIM, Silvaco Athena, Sentaurus Process).
- Ability to work collaboratively across multidisciplinary teams (process, metrology, device, modelling).