About the role
AI summarisedSenior/Lead Research Engineer responsible for ion implanter and RTA process and equipment support in a semiconductor R&D fab. Role involves troubleshooting, tool improvement, cross-functional collaboration, and documentation to ensure stable and repeatable processes.
ResearchFull-timeInstitute of Microelectronics
Key Responsibilities
- Troubleshoot ion implanter and RTA equipment issues in collaboration with equipment engineers and tool vendors.
- Support system calibration, beam tuning, wafer temperature profiling, recipe setup, and equipment qualification.
- Lead improvements for tool stability, beam quality, thermal control accuracy, and wafer-to-wafer repeatability.
- Ensure safe handling of high‑energy ion beam systems and thermal processing tools in compliance with cleanroom protocols.
- Drive tool matching and chamber qualification to ensure consistent results across multiple tools.
- Lead troubleshooting for tool alarms, hardware failures, sensor issues, beam tuning instability, or unexpected drift.
- Support installation, acceptance tests, calibrations, and upgrades for new Implant/RTA systems.
- Partner with equipment engineers, technicians, and integration teams on tool PM scheduling, consumable lifetime tracking, chamber cleans and hardware replacements, and safety and compliance activities.
- Interface with vendors on tool issues, performance improvement, and software/hardware updates.
- Maintain structured documentation including SOPs, process recipes, qualification reports, failure analysis documents, and continuous improvement proposals.
- Document process changes, recipe updates, and corrective action reports.
- Present experimental results, data analytics insights, and recommendations to R&D and management teams.
Requirements
- Bachelor's or Master's degree in Electrical Engineering, Materials Science, Chemical Engineering, Physics, or related fields.
- Relevant experience with Ion implantation (high current, medium current, high energy), RTA/RTP systems (spike anneal, soak, millisecond anneal), Basic Epi concepts (dopant incorporation, epi quality, film stress).
- Strong understanding of equipment fundamentals such as vacuum systems, plasma physics (implant), lamp/thermal systems (RTA).
- Proficiency in data analytics (Python, JMP, MATLAB, or similar).
- Exposure to AI/ML‑based predictive models for process or equipment monitoring.
- Knowledge of SPC, FDC, DOE, and semiconductor manufacturing best practices.
- Hands‑on cleanroom experience, safety‑oriented mindset, and strong problem-solving capabilities.