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GlobalFoundries

Engineer, Process Engineering (Litho)

GlobalFoundries
Foundry OperationsSingaporeFull-time1 months ago
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About the role

AI summarised

Lithography Process Engineer at a global semiconductor foundry, responsible for sustaining, optimizing, and developing photolithography processes in high-volume manufacturing. The role involves monitoring SPC charts, performing CD and overlay analysis, optimizing photoresist processes, managing stepper/scanner tools, conducting DOE, troubleshooting defects, and driving process improvements to ensure CD control, overlay accuracy, and defect reduction.

FoundryFull-timeGeneral

Key Responsibilities

  • Monitor and analyze SPC/ESPC charts for lithography modules using SPACE; respond to OOC/OOS events.
  • Perform critical dimension (CD) and overlay analysis using CD-SEM, scatterometry, and overlay metrology tools (e.g., KLA, ASML YieldStar).
  • Optimize photoresist coating, soft bake, exposure, post-exposure bake (PEB), and development processes.
  • Manage and tune stepper/scanner exposure tools (e.g., ASML, Nikon) for optimal performance and tool matching.
  • Conduct Design of Experiments (DOE) and split lot analysis using JMP, Klarity ACE, and other statistical tools.
  • Troubleshoot lithography defects such as bridging, footing, scumming, and resist residues.
  • Collaborate with Equipment Engineers on tool qualification, focus-exposure matrix (FEM), and process window optimization.
  • Maintain and optimize reticle management, focus and exposure control, and alignment strategies.
  • Drive process improvements to enhance CD uniformity, overlay performance, line edge roughness (LER), and critical dimension uniformity (CDU).
  • Support technology transfers, new product introductions (NPI), and process ramp-up activities.
  • Lead cross-functional teams to resolve yield excursions and implement corrective/preventive actions (CAPA).
  • Ensure compliance with TS16949 and other quality standards through regular audits and documentation updates.

Requirements

  • Bachelor Degree in Electrical / Electronics / Mechanical / Mechatronics / Microelectronics Engineering
  • 1 to 3 years of relevant experience in semiconductor wafer process engineering
  • Proven ability to identify, assess and solve problems
  • Perform Normal / Swing Shift (or 12-hour rotating shift if required)
  • Prior experience in foundry or similar industry background will be an added advantage
  • Analytical with good interpersonal skills
  • Excellent team player
  • High Integrity