About the role
AI summarisedSenior process engineer for ion implantation at A*STAR Institute of Microelectronics, focusing on R&D for next-generation semiconductor fabrication. Responsibilities include developing and validating ion implantation recipes, optimizing post-implant annealing, analyzing defects, and coordinating operations. Requires a degree in Electrical Engineering, Materials Science, or Physics, with basic understanding of solid-state physics and ion implantation.
ResearchFull-timeInstitute of Microelectronics
Key Responsibilities
- Support the development and validation of ion implantation recipes to achieve targeted dopant profiles while minimizing lattice damage. Perform quantitative analysis of SIMS depth profiles, sheet-resistance (Rs) measurements, and RBS/channeling data to correlate process conditions.
- Optimize post-implant annealing conditions to maximize electrical dopant activation while minimizing residual lattice damage, supported by Rs, Hall, SIMS, and structural characterization.
- Analyze implant-induced defects using experimental data and simulations and contribute to strategies for defect suppression and recovery through process optimization.
- Design and execute ion-implantation experiments with systematic variation of dose, energy, tilt, and rotation, and analyze results to improve device performance and process robustness.
- Review work orders, support equipment operators in resolving process-related issues, and work with equipment vendors to improve tool performance, stability, and uptime.
Requirements
- Bachelor's or Master's degree in Electrical Engineering, Materials Science, Physics, or a related field.
- Basic understanding of solid-state physics, including ion implantation processes and dopant activation, familiarity with defect formation and recovery in semiconductors.
- Experience or academic exposure to process characterization and data analysis (SIMS, Rs, RBS/channeling).
- Familiarity with process simulation tools is preferred (e.g., SRIM/TRIM, Silvaco, Sentaurus Process, etc.).
- Candidates with no experience may apply.