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A*STAR

Senior/Lead Research Engineer (APM/Lithography), IME

A*STAR
ResearchSingaporeOnsitePosted 4 weeks ago
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About the role

AI summarised

Lead the central lithography team within the pattern transfer group, driving the selection, development, and qualification of advanced lithography processes for cutting-edge research applications.

ResearchOnsiteInstitute of Microelectronics

Key Responsibilities

  • Lead the central lithography team under the pattern transfer group.
  • Select, procure, and qualify litho tool sets ranging from contact aligner to immersion systems.
  • Collaborate with cross-functional stakeholders to plan and develop novel lithography processes.
  • Validate designs, reticle tap-out, and perform post tap-out verification.
  • Serve as a subject matter expert for researchers and industry partners to enable process and product realization.
  • Perform process characterization and margin studies to define the capability of new process platforms.
  • Publish research outcomes and breakthroughs within the scientific community.
  • Engage with equipment makers/vendors, responsible for selecting and procuring research equipment.
  • Work with the fab team to establish Statistical Process Control (SPC) for newly developed processes.

Requirements

  • Ph.D/Master/Bachelor Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, or Microelectronics.
  • More than 10 years of relevant R&D and/or industry experience with broad exposure to handling 6", 8", and/or 12" substrates.
  • Demonstrated experience with nano to micron technology nodes, preferably in SiC/GaN/Photonics.
  • Proficiency in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner.
  • Hands-on experience in metrology, including CDSEM, Overlay, OCD, DRSEM, and Microscope, capable of recipe creation.
  • Knowledge in design and simulation (Prolith, OPC, etc.) and reticle layout review (oas, gds).
  • Strong grasp of Lithography theory, Photoresist application, and new process setup (swing curve, FEM, DOE, statistical root cause analysis).
  • Excellent interpersonal and communication skills (oral/written) for diverse stakeholders.