About the role
AI summarisedSenior Scientist (APM/Pattern Transfer/Lithography) role at A*STAR in Singapore.
ResearchOnsiteInstitute of Microelectronics
Key Responsibilities
- Leading central lithography team under pattern transfer group.
- Collaborating with cross-functional stakeholders to plan and develop new lithography processes.
- Validating design, reticle tap out, and post-tap out verification.
- Providing technical consultation to overcome process-related challenges and offer solutions.
- Performing process characterization and margin studies to determine new process platform capability.
- Serving as a subject matter expert for researchers and industry partners to enable product realization.
- Publishing process development outcomes and breakthroughs in the research community.
- Engaging with equipment makers/vendors regarding selection and procurement of research equipment.
- Working with the fab team to establish Statistical Process Control (SPC) for newly developed processes.
Requirements
- Ph.D/Master Degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, or Microelectronics, or closely related fields.
- More than 10 years of relevant working experience in R&D and/or industry environment.
- Broad exposure handling 6", 8", and/or 12" substrates covering nano to micron tech nodes.
- Proficiency in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner.
- Hands-on experience in metrology, including CDSEM, Overlay, OCD, DRSEM, and Microscope.
- Ability to create recipes supporting various research requirements.
- Knowledge in design and simulation (Prolith, OPC, etc.) and reticle layout review (oas, gds).
- Strong understanding of Lithography theory, Photoresist characteristics and application, and process optimization techniques.